0

4.2kviews

Explain difference between positive and negative photo resist.

written 2.1 years ago by prajapatijaimin • 3.2k

•   modified 2.1 years ago

ic technology

ADD COMMENT FOLLOW SHARE EDIT

1 Answer

1

830views

written 2.1 years ago by prajapatijaimin • 3.2k

Solution:

positive photo resist	negative photo resist
Softens on exposure to radiation	Hardens on exposure to radiation
Base resin and photo-sensitive material	Polymer and photosensitive compound
Minimum feature size $0.5 \mathrm{elm}$	minimum feature size 2 rm
No swelling and hence better resolution	Unexpected portions will swell when put in developer and it limits resolution
Low step coverage	High step coverage
Eg. PMMA	Eg. S4 8

ADD COMMENT SHARE EDIT