Discuss the role of SU8 in MEMS applications.

• SU-8 is a type of epoxy polymer is a new UV-Curable moaterial for constructing micro mechanical components such as these in MEMS with high aspect ratio.

• This polymer is biocompatible for both in-vtra and in vivo application. It possesses good mechanical properties such as hardness and young's modulus.

• SU-8 has other Capabilities such as photosensitivity and transparency to visible light which makes it compatible with micro fabrication processes.

• This is promising structural material for producing naves devices used in MEMS and bio related applications such as drug delivery system, bio-diagnostic testing kit, bio-MEMS micro fluidics.

• SU-8 is a negative tone photoresist.