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What is MEMS? Give two examples of MEMS devices which are characterized by sensors and actuators.
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Micro-electro-mechanical systems [MEMS] is the integration of mechanical elements, sensors, actuators, and electronics on a common substrate through the utilization of microfabrication technology.
MEMS devices are considered to range in characteristic length from one millimeter down to one micron – many times smaller than the diameter of a human hair. …