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Explain operating principle of pressure senor, Describe the representation process flow for fabricating pressure sensors.

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 10M

1 Answer
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  • Micro pressure sensors are used to monitor and measure minute gas pressure in environments or engineering systems, e.g. automobile intake pressure to the engine.

  • They are among the first MEMS devices ever developed and produced for "real world" applications

  • Micro pressure sensors work on the principle of mechanical bending of …

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