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List types of lithography. Explain in detail X-ray lithography with its major features.
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written 6.0 years ago by | • modified 6.0 years ago |
Types of lithography :
Electron beam lithography
Ion beam lithography
Ion track lithography
x-ray lithography
Nanoimprint lithography
Extreme ultraviolet lithography
x-ray lithography :
x-ray lithography is a process used in electronic industry to selectively remove parts of a thin film.
It uses x-rays to transfer a geometric pattern from a …