Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 5M

• Annealing is a process used in semiconductor device fabrication which consists of heating multiple semiconductor wafers in order to affect their electrical properties.

• Heat treatments are designed for different effects. wafers can be designed for different effects. wafers can be heated in order to activate dopants, change film to film or film to wafer substrate interfaces, density deposited films, change states of grown films, repair damage from implants, move dopants or drive dopants from one film into another or from a film into the wafer substrate.