0
2.2kviews
Name any two polymer materials for MEMS device fabrication. Also explain the importance of these polymer materials for MEMS device fabrication with suitable examples.

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 10M

1 Answer
0
3views

Selection of materials

• Material Selection is an important task as large no. of materials are available for various application.

• Performance of material depends on

i. Stability

ii. Young’s modulus

iii. Melting point

iv. Thermal expansion coefficient

v. Mechanical Hysteresis

Silicon

Ideal substrate material used in MEMS because of …

Create a free account to keep reading this post.

and 5 others joined a min ago.

Please log in to add an answer.