Explain the fabrication process steps for microheater. State its advantages over conventional macro sized heater.

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written 6.1 years ago by

teamques10 ★ 69k

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Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

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mems technology

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written 6.0 years ago by

teamques10 ★ 69k

• modified 6.0 years ago

Fabrication of micro heater on silicon oxide membrane.

Two inch double sided polished [100] P-type wafer is used to fabricate this micro heater.

Microheater fabrication consists following steps.

1.Wafer cleaning

Switch the exhaust of chemical hood. Wear protective gown, google, mouth mask, head cap just before starting work on wet …

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