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Explain scaling of MEMS devices.

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 5M

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Miniaturizing machines and physical systems is an ongoing effort in human civilization. This effort has been intensified in recent years as market demands for: Intelligent, Robust, Multi-functional and Low cost consumer products has become stronger than ever. The only solution to produce these consumer products is to package many components …

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