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What is the need of Lift off method? Explain this method with proper diagrams.
written 6.1 years ago by gravatar for teamques10 teamques10 ★ 69k •   modified 6.0 years ago

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

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mems technology
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written 6.0 years ago by gravatar for teamques10 teamques10 ★ 69k

Lift-off is used with metals that are difficult to etch with plasmas. Lift-off is a patterning process frequently used in MEMS for patterning materials that do not possess a reliable process to etch them (e.g., noble metals). The liftoff process is accomplished via the use of an intermediate layer and …

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