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Explain SOI fabrication using Bonded SOI and Smart cut method.
1 Answer
written 6.5 years ago by |
Bonded SOI wafers –
It creates the buried oxide without ion implantation.
First two silicon wafers undergo thermal oxidation process to form SiO2 layer.
The two hydrophilic surfaces (such as SiO2) are brought into intimate contact of each other to form the buried oxide.
The backside of one of the …