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What is ion implantation? Explain the process with a neat diagram.
1 Answer
written 6.5 years ago by |
Ion implantation is a process by which energetic impurity atoms can be introduced into a single crystal substrate in order to change its electronic properties.
Implantation is ordinarily carried out with ion energies in the 50 – 500 keV range.
Ion Implantation is an alternative to deposition diffusion and is …