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Explain solid source diffusion system with neat diagram. Also give one example of each source of p-type & n-type diffusion.
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teamques10
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In general, diffusion systems are similar to oxidation furnaces. The dopant can be provided in the form of gas, liquid, or solid.
The basic approach is to deposit a glassy layer containing the dopant on the surface of the silicon. A reaction between the glass and the silicon transfers dopant …
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