Write a short note on Vapor Phase Epitaxy.

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written 6.5 years ago by

teamques10 ★ 69k

A synthesis method which consists of depositing a monocrystalline film (from vapor-phase precursors) on a monocrystalline substrate.

A special method in CVD, called Epitaxy or Epitaxial Layer Deposition or Vapor-Phase Epitaxy (VPE), has only a single-crystal form as the deposited layer.

This process is usually carried out for certain combinations …

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