Explain Antenna Effect

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written 7.0 years ago by

teamques10 ★ 69k

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Suppose gate of MOSFET is tied to metal 1 interconnect having a large area (fig.a)
During etching of metal 1, the metal 1 area act as antenna collecting ions and rising in potential.
It is possible that the gate oxide break down(irreversibly) during fabrication.
The antenna effecr may occur for …

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