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Explain Antenna Effect
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  • Suppose gate of MOSFET is tied to metal 1 interconnect having a large area (fig.a)
  • During etching of metal 1, the metal 1 area act as antenna collecting ions and rising in potential.
  • It is possible that the gate oxide break down(irreversibly) during fabrication.
  • The antenna effecr may occur for any large piece of conductive material tied to the gate inducing polysilicon itself.
  • For this reason, submicron CMOS technologies typically reduce the total area of such geometries, thereby minimizing the probability of gate oxide damage.
  • If large area are inevitable, then a discontinuity can be created as in fig.b
  • SO that when metal 1 is being etched, the large area is connected to the gate.
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