Explain fabrication process steps for micro-heater. State its advantages over conventional macro- sized heater

A micro-heater was fabricated based on the simulation results. Figure 4 shows the fabrication process used to manufacture the micro-heater. The micro-heater was 2.4 × 2.6 mm, and the size of the membrane was 1.2 × 1.4 mm. In order to fabricate the micro-heater using poly-Si as the heating element, …