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Explain fabrication process steps for micro-heater. State its advantages over conventional macro- sized heater
written 7.0 years ago by gravatar for gawanderagini gawanderagini • 50 modified 3.2 years ago by gravatar for pedsangini276 pedsangini276 • 4.8k

Explain fabrication process steps for micro-heater. State its advantages over conventional macro- sized heater
mems technology
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written 7.0 years ago by gravatar for gawanderagini gawanderagini • 50 modified 7.0 years ago by gravatar for sanketshingote sanketshingote • 100

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A micro-heater was fabricated based on the simulation results. Figure 4 shows the fabrication process used to manufacture the micro-heater. The micro-heater was 2.4 × 2.6 mm, and the size of the membrane was 1.2 × 1.4 mm. In order to fabricate the micro-heater using poly-Si as the heating element, …

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