Ask
Search
Ask Question
Login
×
×
Welcome back.
and 2 others joined a min ago.
Continue with Google
Continue with email
0
6.8k
views
Explain DRIE in detail. (Deep Reactive Ion Etching)
written
8.3 years ago
by
hetalgosavi
•
1.6k
modified 2.7 years ago by
sagarkolekar
★
11k
mems technology
ADD COMMENT
FOLLOW
SHARE
EDIT
1 Answer
1
275
views
written
8.3 years ago
by
hetalgosavi
•
1.6k
Working principle:
The DRIE process provides thin films of a few microns protective coatings on the sidewalls during the etching process.
It involves the use of a high – density plasma source.
The process allows alternating process of plasma (ion) etching of the substrate material and the deposition of etching-protective …
Create a free account to keep reading this post.
and 2 others joined a min ago.
Continue with Google
Continue with email
ADD COMMENT
SHARE
EDIT
Please
log in
to add an answer.
Community
Users
Levels
Badges
Content
All posts
Tags
Dashboard
Company
About
Team
Privacy
Submit question paper solutions and earn money