0

2.2kviews

Isotropic and Anisotropic Etching

written 8.3 years ago by hetalgosavi • 1.7k

modified 5.4 years ago by shubhamshukla • 40

mems technology

ADD COMMENT FOLLOW SHARE EDIT

1 Answer

0

9views

written 8.3 years ago by hetalgosavi • 1.7k

• Pure silicon crystals are not isotropic in their properties due to non-uniform distribution of atoms at their interior.
• Such anisotropic properties are represented by three distinct planes:

• The (111) plane makes an angle of 54.740 with the (100)plane.
• Corresponding to these (3) planes are 3 distinct directions in which etching takes place: <100>, <110> and <111>.
• The <100> is the easiest direction for etching and the <111> is the hardest direction for etching.

ADD COMMENT SHARE EDIT