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Bulk Micro manufacturing
written 8.1 years ago by | modified 8.1 years ago by |
Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology
Marks: 2M
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written 8.1 years ago by | modified 8.1 years ago by |
Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology
Marks: 2M
written 8.1 years ago by |
Substratesthat can be etched in bulk micromanufacturing include:-
1) Silicon 2) SiC 3) GaAs 4) Special polymers