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Explain Wet etching
written 8.1 years ago by | modified 8.1 years ago by |
Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology
Marks: 4M
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written 8.1 years ago by | modified 8.1 years ago by |
Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology
Marks: 4M
written 8.1 years ago by |
Material to be etched | Wet etchants |
---|---|
Silicon | Hydrofluoric acid (HF) + Nitric acid (HNO3) |
Silicon dioxide | Hydrofluoric,acid (HF), HF + Ammonium fluoride (NH4F) |
Photo resist | Sulphuric acid (H2SO4) + hydrogen peroxide (H2O2) |
Aluminium | Phosphoric acid (H3PO4)+acetic acid Nitric acid (HNO3) + water (H2O) |